Finance Minister and former Chief Minister O Pannerselvam voted in Bodinayakaur in Theni district, from where he is contesting.
Later speaking to reporters, he expressed confidence that Jayalalithaa would return as Chief Minister.
On his chances of winning the polls, he said "my chances are bright."
Edapadi K Palanisamy cast his vote in Edappadi in Salem District from where is seeking re-election, while Minister for Higher Education P Palaniappan exercised his franchise in Pappireddipatti in Dharmapuri District, where he is a contestant.
Vaithiligam is contesting from Orathanadu and Sampath in Cuddalore.
Natham R Viswanathan who is fighting polls from Athur in Dindigul District too cast his vote.
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