The couple got married last night in front of 70 family members and friends, who were tricked that it was Theroux's birthday bash, reported Us magazine.
"It was done completely on the sly. It was their closest friends and very simple and intimate. There were lots of laughs as well as tears and the mood was light," a source said.
Aniston 46, and 43-year-old Theroux cut a giant vanilla and strawberry cake, topped with two puppets.
The surprise wedding was a star-studded affair.
Jason Bateman, Emily Blunt John Krasinski, Ellen DeGeneres and Portia de Rossi, Will Arnett, former Spider-Man Tobey Maguire, Jennifer Meyer, Lake Bell and Scott Campbell, Terry Richardson, Jimmy Kimmel, Billy Crudup, Sia, Kathryn Hahn and Whitney Cummings increased the celebrity quotient.
Cox was not only Aniston's maid of honour but was also the last one to leave the wedding.
"The last guest to leave was Courteney," said an observer. "She left right after Ellen DeGeneres and Jimmy Kimmel. She left around 3 am. They still had the music pretty loud."
"The Good Girl" actress planned the entire wedding and kept things under wraps and only those close to her knew about the plan.
Theroux, 43, and Aniston got engaged in August 2012 after more than a year of dating
The newlyweds have now jetted off to Bora Bora via a private jet on their honeymoon.
Reps for the couple did not immediately comment.
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