He was accompanied by his wife Gayatri and other family members.
Temple officials said that after prayers the couple was presented with a sacred silk cloth, a holy photo, and 'prasadam'.
The officials said they arrived here last evening and offered prayers at the Goddess Padmavathi temple at Tiruchanur.
Later, the CJI with family members trekked on foot an 11-km-long stairway leading to the hill shrine, they added.