Nath, head of the Baba Mastnath Math in Rohtak, was laid to rest in Samadhi at the Math premises with full state honours. He was 61.
Prime Minister Narendra Modi condoled his death.
"Saddened by the demise of LS MP from Alwar, Mahant Chand Nath ji. He will be remembered for his rich social work. My deepest condolences," Modi said in a tweet.
Thousands of Nath's followers paid tributes to the departed soul. Earlier, his body was kept at the Math to enable people to pay their last respects.
"He was battling an aggressive thyroid cancer for the last two-and-a-half years. He had already undergone chemotherapy and radiotherapy and was undergoing immunotherapy," the doctor told PTI.
"We had conducted tracheostomy. He was being fed through a tube in his stomach. Yesterday, he was doing fine during the daytime, but his condition deteriorated at night and he suffered a cardiac arrest. He died around 12:40 am," he said.
The doctor said that Nath survived longer only because he was "mentally tough" and "very positive".
"His cancer was aggressive in 2015 only. It just tore through his body but his toughness made him battle it for much longer," he said.
Nath had won the Alwar seat in the 2014 Lok Sabha polls defeating former Union minister Jitendra Singh, who was the Congress candidate.
Nath was the Chancellor of Baba Mast Nath University in Rohtak.
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